DC and AC scanning thermal microscopy using micro-thermoelectric probe†
نویسندگان
چکیده
A scanning thermal microscope working in passive mode is described. This tool uses a thermocouple probe and is presented as a thermal imaging system. The surface temperature distribution of a thermal micro-component is presented. We point out the capacity of our system to perform surface temperature images under conditions for which most of usual techniques cannot operate. The thermal microscope is insensitive to optical surface parameters, can operate from ambient to 1000 K and allow measuring DC and AC temperature components.
منابع مشابه
Quantitative thermal microscopy using thermoelectric probe in passive mode.
A scanning thermal microscope working in passive mode using a micronic thermocouple probe is presented as a quantitative technique. We show that actual surface temperature distributions of microsystems are measurable under conditions for which most of usual techniques cannot operate. The quantitative aspect relies on the necessity of an appropriate calibration procedure which takes into account...
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